Ion Beam Analysis

Rutherford Backscattering Spectroscopy (RBS)

 

# Composition determination

# Stoichiometry

# Thickness measurement of thin films

# Elements depth profiling

# Interface study

Nuclear Reaction Analysis (NRA)

 

# Light element analysis

# Light elements depth profiling

# Low background and high sensitivity

Elastic Recoil Detection (ERD)

 

# Light elements analysis

# Light elements depth profiling

# multi elements analysis

Particle (Proton) Induced X-ray Emission (PIXE)

 

# Multi elements analysis (20 - 30 elements)

# High sensitivity 1 ppm - 0.1 ppm

# Material science, Bio medicine, Environmental, Geology, Archeology, and Art

 

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RBS Ion Channeling (RBS-C)

 

# Impurity lattice location

# Damage proofing

# Strain of multilayer epi-films

# Interface and Surface study