Ion/Atom Beam Lithography
Atom Beam Lithography printing tool, including a vacuum exposure station, duoplasmatron ion/atom source, power supplies, and instrumentation.
Ion/Atom Beam Lithography
Atom Beam Lithography printing tool, including a vacuum exposure station, duoplasmatron ion/atom source, power supplies, and instrumentation.
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University of Houston Center for Nanomagnetic Systems