Electron Microprobe Analysis
Capabilities |
 JEOL JXA-8600 |
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![[Bullet]](images/bullet.gif){kind=small} |
Four
wavelength dispersive spectrometers for quantitative elemental analysis |
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Beryllium window Energy Dispersive Spectrometer | |
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Backscattered and secondary electron imaging | |
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X-ray mapping | |
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Stage automation for unattended operation | |
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Analysis for elements from Be to U | |
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On-line ZAF and Frz matrix corrections | |
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Thin-film analysis | |
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Upgraded system automation (1997) Geller Dqant | |
P r e c i s e Q u a n t i t a t i v e A n a l y s i s o f I n o r g a n i c M a t e r i a l s
W a v e l e n g t h d i s p e r s i v e s p e c t r o m e t r y ( W D S ) h a s m u c h g r e a t e r a b i l i t y t o s e p a r a t e x - r a y s o f s i m i l a r e n e r g y
than does energy dispersive spectrometer (EDS).
T h e J E O L J X A 8 6 0 0 h a s f o u r W D S s y s t e m s t h a t p e r m i t h i g h - q u a l i t y a n a l y s i s o f a l l e l e m e n t s f r o m B t o T h on a spot size area of less than 5 microns.
C o m p a r i s o n o f x - r a y i n t e n s i t i e s w i t h t h o s e d e t e r m i n e d o n s t a n d a r d s o f k n o w n c o m p o s i t i o n s p r o v i d e s
h i g h - q u a l i t y c h e m i c a l a n a l y s e s i n a r e l a t i v e l y s h o r t t i m e . T y p i c a l e l e m e n t a l a n a l y s e s ( a t > 1 % l e v e l s )
t a k e t h r e e m i n u t e s ( w i t h u p t o f o u r e l e m e n t s s i m u l t a n e o u s l y d e t e r m i n e d ) a n d h a v e a c c u r a c y a n d p r e c i s i o n
o f 1 % r e l a t i v e o r b e t t e r . A n a l y s i s o f e l e m e n t s p r e s e n t a t l o w e r c o n c e n t r a t i o n s t a k e l o n g e r b u t c o n t e n t s
< 1 0 0 p p m a r e r e a d i l y d e t e r m i n e d w i t h b e t t e r t h a n 1 0 % p r e c i s i o n . A l l i n t e n s i t i e s a r e c o l l e c t e d a u t o m a t i c a l l y
a n d c o r r e c t i o n s p e r f o r m e d o n - l i n e . EDS, which has advantages of speed of analysis and of little requirements in the way of sample preparation,
is also available on this instrument for quick identification of the elements present in the samples.
X - r a y M a p p i n g
T h e m i c r o p r o b e a l s o h a s s e c o n d a r y a n d b a c k s c a t t e r e d e l e c t r o n i m a g i n g .
I t h a s t h e f u r t h e r a b i l i t y t o p e r f o r m x - r a y m a p p i n g . X - r a y i n t e n s i t y i n f o r m a t i o n m a y b e d i r e c t e d f r o m e a c h
s p e c t r o m e t e r t o a c o m p u t e r a s t h e e l e c t r o n b e a m s c a n s o v e r a s a m p l e t o p r o v i d e x - r a y m a p s t h a t i n d i c a t e r e l a t i v e
c o n c e n t r a t i o n s o f e l e m e n t s i n t h e t a r g e t a t a s c a l e o f d o w n t o about 1 micron .
For more information about the EMPA facilities contact James K. Meen.