JEOL JSM 6400 Scanning Electron Microscope



[Bullet] Electron beam Energy: 0.2-40 keV
[Bullet] Secondary Electron Imaging: resolution of 1.5 nm
[Bullet] Backscattered Electron Imaging
[Bullet] Energy Dispersive Spectrometer (EDS):
X-ray range of 0.15-40 keV
Energy resolution of 55eV
[Bullet] Electron Back Scattered Diffraction (EBSD):
Mineral orientation mapping of thin sections
Kikuchi patterns

Imaging at the Nanoscale
  The JEOL JSM6330F is a field emission SEM with resolution of 1.5 nm, allowing imaging of nanoscale materials.

Compositional Imaging
  Imaging may also be performed with backscattered electrons. This technique has poorer resolution than secondary electron imaging but yields compositional information insofar as the backscattered electron intensity depends upon average atomic number. Phases of different compositions image at different grayscales, allowing grain shapes and sizes and phase proportions to be determined digitally.

Semi-Quantitative Analysis of Inorganic Materials
  The SEM is equipped with an energy dispersive spectrometer (EDS) that allows rapid compositional analysis. EDS of x-rays emitted by atoms in a target under electron bombardment rapidly provides information about atomic contents of that target. All elements heavier than Be may be analyzed simultaneously on a 1-3 microns region. On-line data reduction gives results in weight or atomic percentages with minimal user input.

Crystal Orientation Mapping
  The SEM is equipped with an EBSD system for determining crystal structural orientations. Electron backscattered diffraction (EBSD) uses scattering of electrons that backscatter from the upper part of a target to construct a Kikuchi pattern demonstrating the crystal structure of the target. On-line comparison with the theoretical pattern indicates orientation of the target. Typically, a pattern is obtained and indexed in half a second. A grid of points can be set up that automatically index the target and draw a crystal orientation map that yields information about particle sizes, shapes, and orientations. Maps may be determined for any flat crystalline material-metals, ceramics, and rocks have all been studied in the lab. The grid size and spacing is chosen to maximize the information yielded. The pattern is derived from a region 100-500 nm across and 50 nm deep so nanocrystalline materials can be studied. A 100x100 grid takes about 90 minutes to map.

For more information about this SEM, write to

If you are a certified user, you can come to our building (HSC202) and book the SEM by writing your name on the schedule posted on the SEM door (room 144)

Bring a CD, a memory stick, or a zip disk (100Mb) to retrieve your data files.

Send mail to with questions or comments about this web site.
Last modified: May 9, 2006