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Device and method for manufacturing a particulate filter with regularly spaced micropores

The Innovation

The invention is a low cost manufacturing process for micro and nanoporous filter membranes with highly uniform, high density arrays of regularly spaced pores.

Competitive Edge

Significantly less expensive than films on solid substrates. Provides a process for manufacturing large area filter membranes from polymeric sheet stock without the need of a flat solid substrate or of assembling small filters to form a single large filter.

Targeted Market

Very large market. For example, the invention can be used in the manufacture of integrated circuits (ICs).